Introduction to Energy Dispersive Spectroscopy (EDS/EDX) Large Area Mapping in SEM

In this tutorial, we discuss the basics of Large Area Mapping (LAM) in SEM and how it could be used to acquire data from large areas automatically. We go through the LAM functionality in AZtecLive software, while explaining the different settings and showing you how to get the best of this great tool to understand the chemistry of your sample with the EDS technique.

You will learn:

• How to acquire data from large areas automatically with LAM
• When and where to use LAM
• How to get the best out of LAM by optimizing the settings in AZtecLive